| Autor: |
Zaman, Mohammed H., Carlen, Edwin T. |
| Předmět: |
|
| Zdroj: |
IEEE Transactions on Semiconductor Manufacturing; Feb99, Vol. 12 Issue 1, p129, 10p, 5 Diagrams, 1 Chart, 5 Graphs |
| Abstrakt: |
Part II. Discusses the expansion of the sequences produced by the basic algorithms of the software Michigan synthesis tools for integrated circuits (MISTIC) into complete process flows. Selection of recipes for steps and determination of their parameters; Deposition steps; Calculation of reactive growth steps; Etching parameters; Lithography steps. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
