| Autor: |
Mamleyev, Emil R., Lee, Chun Him, Korvink, Jan G., Kohl, Manfred, Poletkin, Kirill V. |
| Předmět: |
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| Zdroj: |
Actuators; Feb2023, Vol. 12 Issue 2, p48, 13p |
| Abstrakt: |
This paper presents the results of a comprehensive study of the pull-in phenomenon in the hybrid levitation microactuator (HLMA), in which square-shaped proof masses (PMs) of different sizes, namely, length sides of 2.8 and 3.2 mm and thicknesses of 25 and 10 μm were electromagnetically levitated. The pull-in actuation of the square-shaped PMs was performed by the electrostatic force generated by the set of energized electrodes and acting on the bottom surface of the PMs along the vertical direction. The pull-in parameters, such as pull-in displacements and the corresponding applied pull-in voltages, were measured with the developed setup. The experimental measurements showed that the pull-in actuation is nonlinearly dependent on the size and mass of the PMs and a levitation height. In particular, it was found that PMs levitated within a height range from 140 to 170 μm can be stably displaced within a range of 30 μm. The results of measurements were extensively simulated with the developed analytical model by means of the quasi-FEM method. The direct comparison of the results of simulation and measurements showed a very good agreement between the theory and experiments. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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