| Autor: |
Heupel, Julia, Pallmann, Maximillian, Körber, Jonathan, Hunger, David, Reithmaier, Johann Peter, Popov, Cyril |
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| Zdroj: |
Physica Status Solidi. A: Applications & Materials Science; Feb2023, Vol. 220 Issue 4, p1-8, 8p |
| Abstrakt: |
Certain aspects before and during the fabrication of single‐crystal diamond (SCD) membranes are highlighted, which are decisive to obtain high‐quality membranes with low surface roughness values around 0.2 nm on a small area scale. In addition to the requirements for the starting material, including a high planarity and a moderate surface roughness, the importance of cleaning processes to minimize particles and impurities before and during the structuring is emphasized. With the help of a planarization procedure, consisting of a combination of different Ar/Cl2 recipes with low etch rates, surface defects like grooves due to polishing are minimized and smooth surfaces are acquired. Severe micro‐masking can be prevented by the application of a cyclic Ar/Cl2 + O2 recipe, allowing finally the fabrication of defect‐minimized and planarized SCD membranes in the thickness range between a few microns and a few hundred nanometers. The high quality of the structured SCD membranes is evidenced with a morphological as well as optical characterization via fiber‐based microcavity measurements. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
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