| Autor: |
Murin, D. B., Pivovarenok, S. A., Chesnokov, I. A., Gogulev, I. A. |
| Předmět: |
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| Zdroj: |
Russian Microelectronics; Dec2022, Vol. 51 Issue 6, p368-375, 8p |
| Abstrakt: |
The electrophysical characteristics of carbon tetrafluoride plasma dependent on the external parameters of a discharge (gas pressure and discharge current) are investigated in a wide range of conditions. It is shown that the value of the gas temperature increases linearly with the growth in the gas pressure and discharge current. The behavior of the reduced electric field strength at low pressures is typical of electronegative gases. The radiation spectra of the carbon tetrafluoride plasma are obtained and thoroughly examined. It is shown that plasma radiation is represented by atomic and molecular components and the dependences of the radiation intensities of lines on the external conditions of discharge are determined by the excitation of the emissive states under direct electron impact. It is demonstrated that the character of the obtained dependences is not contradictory to the general understanding about the kinetics of the processes of the generation and loss of active particles in molecular gases, which allows using the considered maximums to diagnose the composition of plasma and the kinetics of plasmochemical processes. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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