Precise optical constants: determination and impact on metrology, simulation, and development of EUV masks.
| Autor: | Saadeh, Qais, Mesilhy, Hazem, Soltwisch, Victor, Erdmann, Andreas, Ciesielski, Richard, Lohr, Leonhard, Andrle, Anna, Philipsen, Vicky, Thakare, Devesh, Laubis, Christian, Scholze, Frank, Kolbe, Michael |
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| Zdroj: | Proceedings of SPIE; 9/18/2022, Vol. 12293, p122930Y-122930Y-12, 1p |
| Databáze: | Complementary Index |
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