Integration of high-performance spin-orbit torque MRAM devices by 200-mm-wafer manufacturing platform.

Autor: Zhang, Hongchao, Ma, Xiangyue, Jiang, Chuanpeng, Yin, Jialiang, Lyu, Shuqin, Lu, Shiyang, Shang, Xiantao, Man, Bowen, Zhang, Cong, Li, Dandan, Li, Shuhui, Chen, Wenjing, Liu, Hongxi, Wang, Gefei, Cao, Kaihua, Wang, Zhaohao, Zhao, Weisheng
Zdroj: Journal of Semiconductors; Oct2022, Vol. 43 Issue 10, p1-9, 9p
Databáze: Complementary Index