| Autor: |
He, Minfei, Zhang, Zhimin, Cao, Chun, Qiu, Yiwei, Shen, Xiaoming, Zhou, Guozun, Cai, Zixin, Sun, Xinjie, He, Xin, Xu, Liang, Liu, Xi, Ding, Chenliang, Cao, Yaoyu, Kuang, Cuifang, Liu, Xu |
| Předmět: |
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| Zdroj: |
PhotoniX; 10/25/2022, Vol. 3 Issue 1, p1-14, 14p |
| Abstrakt: |
Advances in direct laser writing to attain super-resolution are required to improve fabrication performance and develop potential applications for nanophotonics. In this study, a novel technique using single-color peripheral photoinhibition lithography was developed to improve the resolution of direct laser writing while preventing the chromatic aberration characteristics of conventional multicolor photoinhibition lithography, thus offering a robust tool for fabricating 2D and 3D nanophotonic structures. A minimal feature size of 36 nm and a resolution of 140 nm were achieved with a writing speed that was at least 10 times faster than existing photoinhibition lithography. Super-resolution and fast scanning enable the fabrication of spin-decoupled metasurfaces in the visible range within a printing duration of a few minutes. Finally, a subwavelength photonic crystal with a near-ultraviolet structural color was fabricated to demonstrate the potential of 3D printing. This technique is a flexible and reliable tool for fabricating ultracompact optical devices. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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