| Autor: |
Pİşkİn, Berke, Pİşkİn, Fatİh |
| Předmět: |
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| Zdroj: |
JOM: The Journal of The Minerals, Metals & Materials Society (TMS); Nov2022, Vol. 74 Issue 11, p4181-4187, 7p |
| Abstrakt: |
A comprehensive study was carried out to evaluate single-phase BaZr0.80Y0.20O3-δ thin films produced by RF magnetron sputtering using a single target material. The present study mainly involved three objectives, i.e., production of a single-phase BaZr0.80Y0.20O3-δ sputter target using a deformable compaction die, RF sputtering of thin films using a single target material, and the electrochemical assessment of the BaZr0.80Y0.20O3-δ thin films. A single-phase sputter target with a 2″ diameter was produced by pressing at 125 MPa via deformable compaction dies and sintering at 1500°C for 10 h. Highly textured BaZr0.80Y0.20O3-δ thin films were obtained by RF sputtering of the target material fabricated in the study. Electrochemical investigations based on 4-probe resistivity measurement and electrochemical impedance spectrometry revealed that (110) oriented BaZr0.80Y0.20O3-δ films exhibited an improved conductivity. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
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