Evaluation of Lattice-Spacing of SiGe/Si by NBD using Two-condenser-lens TEM.
| Autor: | Yamanaka, Junji, Oguni, Takuya, Sano, Yuichi, Ohshima, Yusuke, Onogawa, Atsushi, Hara, Kosuke O., Arimoto, Keisuke |
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| Zdroj: | Microscopy & Microanalysis; 2022 Supplement, Vol. 28, p2812-2813, 2p |
| Databáze: | Complementary Index |
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