Opportunities and Challenges of Ultra Short Pulsed Lasers with Dual Focused Ion Beams for Characterization of Full-Scale Electronic Devices.

Autor: Deitz, Julia I., Perry, Daniel L., Polonsky, Andrew T., Ruggles, Timothy J., Jungjohann, Katherine L., Harrison, Katharine L., McBrayer, Josefine D., Michael, Joseph R.
Zdroj: Microscopy & Microanalysis; 2022 Supplement, Vol. 28, p884-886, 3p
Databáze: Complementary Index