| Autor: |
Blumröder, Ulrike, Köchert, Paul, Flügge, Jens, Füßl, Roland, Ortlepp, Ingo, Manske, Eberhard |
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| Zdroj: |
Technisches Messen; Oct2022, Vol. 89 Issue 10, p687-703, 17p |
| Abstrakt: |
Keywords: Nanopositioning- and nanomeasuring machines; optical frequency comb; He-Ne laser; traceability; laser stabilization; Nanopositionier- und Nanomessmaschinen; Optische Frequenzkämme; He-Ne Laser; Rückführbarkeit; Laserstabilisierung EN Nanopositioning- and nanomeasuring machines optical frequency comb He-Ne laser traceability laser stabilization DE Nanopositionier- und Nanomessmaschinen Optische Frequenzkämme He-Ne Laser Rückführbarkeit Laserstabilisierung 687 703 17 09/26/22 20221001 NES 221001 1 Introduction The rapid development and increasing impact of nanotechnology in research and industry entails the application of new fabrication approaches and characterization tools that allow to manipulate, characterize and image three dimensional nanostructures with (sub)nanometer precision and increasing scanning speed over several tens to hundreds millimeters measurement range [[1]], [[2]], [[3]], [[4]], [[5]]. To lock the repetition rate HT ht to the RF-reference its fourth harmonic is mixed with the fixed frequency output of a phase-locked oscillator (PLO) [[33]]. The He-Ne lasers are part of a compact, enclosed laser module that contains three gas lasers stabilized with a two-mode-comparison technique [[22]] as well as the laser control and stabilization electronics. The iodine-stabilized He-Ne laser indicates a HT ht - dependence as described in [[47]]. [Extracted from the article] |
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Complementary Index |
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