Controlling Galvanic Corrosion with Oxalic Acid and Imidazole for Chemical Mechanical Planarization of Cobalt-Copper Interface.
| Autor: | Hazarika, Jenasree, Gupta, Apeksha, Rajaraman, Prasanna Venkatesh |
|---|---|
| Zdroj: | ECS Journal of Solid State Science & Technology; May2022, Vol. 11 Issue 5, p267-277, 11p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|