A Novel Strategy Achieving GaN Ultra-Smooth Surface via a Square, Flat Top Beam Shaped Femtosecond Laser Processing Combined with Chemical Mechanical Polishing.
| Autor: | Chen, Gaopan, Peng, Qingfa, Long, Jiangyou, Luo, Haimei, Zhou, Yan, Xie, Xiaozhu, Pan, Guoshun, Wang, Xiaofeng |
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| Zdroj: | ECS Journal of Solid State Science & Technology; May2022, Vol. 11 Issue 5, p252-260, 9p |
| Databáze: | Complementary Index |
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