Source/Drain Activation for Flexible Poly-Si Nanoscale pFETs with a Laser-Buffer Layer by CO2 laser Annealing.
| Autor: | Po-Cheng Hou, Wen-Hsien Huang, Ming-Hsuan Kao, Hsing-Hsiang Wang, Jia-Min Shieh, Chang-Hong Shen, Fu-Ming Pan, Li Chang |
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| Zdroj: | ECS Journal of Solid State Science & Technology; Jun2022, Vol. 11 Issue 6, p330-335, 6p |
| Databáze: | Complementary Index |
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