MEMS sensor for detection and measurement of ultra-fine particles.
| Autor: | Pachkawade, Vinayak, Tse, Zion |
|---|---|
| Zdroj: | Engineering Research Express; Jun2022, Vol. 4 Issue 2, p1-17, 17p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Pachkawade, Vinayak, Tse, Zion |
|---|---|
| Zdroj: | Engineering Research Express; Jun2022, Vol. 4 Issue 2, p1-17, 17p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|