B and Ga Co-Doped Si1-xGex for p-Type Source/Drain Contacts.

Autor: Rengo, Gianluca, Porret, Clement, Hikavyy, Andriy, Rossee, Erik, Ayyad, Mustafa, Morris, Richard J. H., Khazaka, Rami, Loo, Roger, Vantomme, André
Zdroj: ECS Journal of Solid State Science & Technology; Feb2022, Vol. 11 Issue 2, p232-241, 10p
Databáze: Complementary Index