| Autor: |
Navarro, Rafael, Hopwood, Jeffrey A. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 9/14/2022, Vol. 132 Issue 10, p1-8, 8p |
| Abstrakt: |
The electron density (n e) and argon metastable density (1 s 5) of a 43 GHz microplasma are obtained using the zero-dimensional plasma kinetics solver (ZDPlasKin®) for an incident power of 160 and 1000 mW and argon pressures of 10 – 600 Torr (1.3 × 10 3 to 8.0 × 10 4 Pa). These simulations are compared with previously published experimental data. To determine the self-consistent electric field in the modeled plasma, the three-dimensional millimeter wave fields are computed as a function of electron density using ANSYS EM19.2, HFSS®. This electromagnetic field model is coupled to ZDPlasKin such that any increase in the simulated plasma density correctly attenuates the simulated electric field within the microplasma. The electron density is found to be sensitive to argon gas temperature, so a two-zone temperature model was needed to obtain agreement with experimental measurements. The temperature in the central core of the microplasma was determined by a previous experimental study. That temperature was used as an input to the model for the simulation of volume recombination losses. The outer regions of the microplasma are assumed to be in equilibrium with the walls (300 K). This second temperature was used in the model to determine diffusion losses. The modeled electron and metastable densities are of the order 10 20 and 10 18 m − 3 , respectively. This is in good agreement with those measured experimentally as long as the two-zone temperature model is used. In the absence of a hot gas core, the modeled three-body recombination rates are excessive and the simulation severely under-predicts the electron density and over-estimates the metastable density. We conclude that the millimeter wave microplasma has a hot core (2500 K at 600 Torr) that rarifies the argon gas and effectively reduces three-body recombination. This allows one to achieve high electron density on the order of 10 20 m − 3 with only 100 mW of wave power. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
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