| Autor: |
Zhao, Rongyu, Cui, Jiangong, Yu, Yaxin, Zhai, Xiaoping, Chu, Xiaoxia, Zhu, Min, Wu, Bofeng, Yang, Yuhua, Wang, Renxin, He, Changde, Zhang, Guojun, Zhang, Wendong |
| Předmět: |
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| Zdroj: |
Journal of Micromechanics & Microengineering; Aug2022, Vol. 32 Issue 8, p1-8, 8p |
| Abstrakt: |
An acoustic sensor packaged with polydimethylsiloxane film sandwich structure is proposed in this paper. The sensor uses a flat glass with a square hole in the middle as the substrate structure. The cavity length of the microfiber knot resonator is significantly changed by the applied acoustic pressure, which is ultimately manifested as a change in the strength of the sensor signal. The sensor has a good response at frequencies from 0.1 to 10 kHz, and has a sensitivity of 0.92 mV Paâ'1 at 1 kHz acoustic frequency. The sensor studied in this paper has the advantages of wide frequency band, small size and low cost, and has a good application prospect in the field of acoustic signal detection. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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