| Autor: |
Wang, Ziwei, Shen, Ying, Lei, Chong, Wang, Jiazeng, Zhao, Shuxiang, Chen, Jiamin, Chu, Zhaoqiang, Gao, Junqi |
| Předmět: |
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| Zdroj: |
IEEE Electron Device Letters; Aug2022, Vol. 43 Issue 8, p1327-1330, 4p |
| Abstrakt: |
Fluxgate magnetometers have been widely applied in many fields, such as magnetic anomaly detection, e-compass, etc. In this work, a micro-fluxgate magnetometer based on the implementation of the MEMS technology is proposed. The core of the fluxgate was fabricated by using an amorphous Co-based magnetic material, which shows a good degree of linearity below 0.5 Oe. Moreover, a mixed-signal lock-in circuit was designed to drive and capture signals. Magnetic noise density of such a device was limited to the value of 500 pT/ $\surd $ Hz at 1 Hz, while the capability of sensing a DC magnetic field of 6 nT was demonstrated, which presents a good development prospect in the weak signal detection domain. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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