Imaging of buried overlay and alignment markers using picosecond acoustic microscopy.
| Autor: | Mehendale, Manjusha, Antonelli, Andy, Mair, Robin, Mukundhan, Priya, Bogdanowicz, Janusz, Blanco, Victor, Charley, Anne-Laure, Leray, Philippe |
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| Zdroj: | Proceedings of SPIE; 1/20/2022, Vol. 12053, p1205313-1205313, 1p |
| Databáze: | Complementary Index |
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