Coupling element effect on support loss of coupled oscillators for mass and analyte sensing applications.

Autor: Wang, Rong, Wang, Dong F., Xia, Cao, Feng, Haonan, Wang, Xin
Předmět:
Zdroj: Microsystem Technologies; Jul2022, Vol. 28 Issue 7, p1663-1671, 9p
Abstrakt: The nonlinear synchronous resonance or internal resonance in coupled oscillators has great potential for sensing applications, while a higher quality factor is desirable for its low-frequency excitation and high-frequency vibration characteristics. Two types of coupled oscillators are designed to explore the effect of the coupling element geometry on the support loss, one of the main energy dissipation mechanisms relevant to quality factor. Firstly, if the coupling elements are attached to the substrate, a "jump down" phenomenon is confirmed. Secondly, if the coupling elements are detached from the substrate, the proposed support-limited coefficient decreases monotonously with the increase of the coupling width, while both the high-frequency and low-frequency modes have asynchronous maximum values with the changing of coupling position and coupling length respectively. Thirdly, a parallelogram geometry is found to be capable of making the maximum value of the high-frequency mode shift to synchronize with that of the low-frequency mode. Finally, a support-limited quality factor enhancement scheme is therefore proposed by regulating the parallelogram geometry with both the coupling position and the coupling length. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index