Flip-chip-integrated silicon nitride ECL at 640nm with relaxed alignment tolerances.
| Autor: | Kluge, Ines, Schulten, Michael, Tabatabaei Mashayekh, Alireza, Rodrigo, Rebecca, Ackermann, Manuel, Ghannam, Ibrahim, Stassen, Andim, Merget, Florian, Leisching, Patrick, Witzens, Jeremy |
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| Zdroj: | Proceedings of SPIE; 12/4/2021, Vol. 12006, p120060E-120060E-9, 1p |
| Databáze: | Complementary Index |
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