Optical and electrical properties of room temperature prepared α-IGZO thin films using an In2Ga2ZnO7 ceramic target.

Autor:	Zhang, Yu, Chen, Jie, Sun, Ben-shuang, Liu, Shuai, Wang, Zhi-jun, Liu, Shu-han, Shu, Yong-chun, He, Ji-lin
Zdroj:	Journal of Central South University; Apr2022, Vol. 29 Issue 4, p1062-1074, 13p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink