| Autor: |
Kelly, Jon, Male, Andrew, Rubies, Nicholas, Mahoney, David, Walker, Jessica M., Gomez-Gonzalez, Miguel A., Wilkin, Guy, Parker, Julia E., Quinn, Paul D. |
| Předmět: |
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| Zdroj: |
Review of Scientific Instruments; Apr2022, Vol. 93 Issue 4, p1-9, 9p |
| Abstrakt: |
A new stage design concept, the Delta Robot, is presented, which is a parallel kinematic design for scanning x-ray microscopy applications. The stage employs three orthogonal voice coils, which actuate parallelogram flexures. The design has a 3 mm travel range and achieves rms position jitter, integrated from 1 Hz to 1 kHz, of 2.8 and 1.3 nm perpendicular to the beam and 5.6 nm along the beam direction with loads up to 350 g. The Delta Robot design process used a mechatronics approach of iterative modeling and simulation to develop the system and validate performance. The design considerations, design process, stability, and operational performance on the hard x-ray nanoprobe at Diamond Light Source are presented. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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