| Autor: |
Gubaidulina, T. A., Dorofeeva, T. I., Sergeev, V. P., Kalashnikov, M. P., Voronov, A. V. |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings; 2022, Vol. 2509 Issue 1, p1-4, 4p |
| Abstrakt: |
The treatise studies the composition and structure of layers composing the multilayer Al-Si-N/Ni/Al-Si-N coatings produced by magnetron sputtering. The results confirm the columnar crystal structure in all the layers, with Al-Si-N layer having a nanocrystalline structure, and the nickel layer having a monocrystalline structure. The XRD analysis revealed an AlN phase with hexagonal close-packed lattice together with Si3N4 phase in the Al-Si-N layer, which was confirmed by the interpretation of microdiffraction images obtained by a transmission electron microscope. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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