Silicide formation in the Ta/Ti/Si system by reaction of codeposited Ta and Ti with Si (111)...

Autor:	Pelleg, Joshua, Goldshleger, N.
Předmět:	SILICIDES SILICON REACTIVITY (Chemistry)
Zdroj:	Journal of Applied Physics; 2/1/1999, Vol. 85 Issue 3, p1531, 9p, 7 Graphs
Abstrakt:	Presents information on a study which investigated the codeposited tantalum and titanium on silicon (100) substrates using x-ray diffraction and sheet resistance measurements. Experimental details; Results and discussion; Conclusions.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu