Coverage dependent desorption dynamics of deuterium on Si(100) surfaces: Interpretation with a diffusion-promoted desorption model.

Autor: Matsuno, T., Niida, T., Tsurumaki, H., Namiki, A.
Předmět:
Zdroj: Journal of Chemical Physics; 1/8/2005, Vol. 122 Issue 2, p024702, 7p, 1 Diagram, 4 Graphs
Abstrakt: We studied coverage dependence of time-of-flight (TOF) spectra of D2 molecules thermally desorbed from the D/Si(100) surface. The mean translational energies 〈Et〉 of desorbed D2 molecules were found to increase from 0.20±0.05 eV to 0.40±0.04 eV as the desorption coverage window was decreased from 1.0 ML>=θD>=0.9 ML to 0.2 ML>=θD>=0 ML, being consistent with the kinetics switch predicted in the interdimer mechanism. The measured TOF spectra were deconvoluted into 2H, 3H, and 4H components by a curve fitting method along the principle of detailed balance. As a result, it turned out that the desorption kinetics changes from the 4H to the 3H situation at high coverage above θD=0.9 ML, while the 2H desorption is dominant for a quite wide coverage region up to θD=0.8 ML. A dynamic desorption mechanism by which the desorption is promoted by D-atom diffusion to dangling bonds was proposed. © 2005 American Institute of Physics. [ABSTRACT FROM AUTHOR]
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