MEMS devices based on self-organizing semiconductors structures.
| Autor: | Denisenko, Mark A., Isaeva, Alina S., Lysenko, Igor E., Tkachenko, Alexey V. |
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| Zdroj: | Proceedings of SPIE; 5/4/2022, Vol. 12157, p121570K-121570K-6, 1p |
| Databáze: | Complementary Index |
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