Reliability issues for electrostatically actuated MEMS switch.
| Autor: | Uvarov, Ilia V., Izyumov, Mikhail O. |
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| Zdroj: | Proceedings of SPIE; 5/4/2022, Vol. 12157, p121570I-121570I-6, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Uvarov, Ilia V., Izyumov, Mikhail O. |
|---|---|
| Zdroj: | Proceedings of SPIE; 5/4/2022, Vol. 12157, p121570I-121570I-6, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|