Effect of annealing on electrical and optical properties of TiN thin films.
| Autor: | Kovaliuk, Taras T., Solovan, Mykhailo M., Mostovyi, Andrii I., Оrletskyi, Ivan G. |
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| Zdroj: | Proceedings of SPIE; 4/3/2022, Vol. 12126, p121260B-121260B-6, 1p |
| Databáze: | Complementary Index |
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