Resolving Mechanical Properties and Morphology Evolution of Free‐Standing Ferroelectric Hf0.5Zr0.5O2.

Autor: Tharpe, Troy, Zheng, Xu-Qian, Feng, Philip X.-L., Tabrizian, Roozbeh
Předmět:
Zdroj: Advanced Engineering Materials; Dec2021, Vol. 23 Issue 12, p1-1, 1p
Abstrakt: The cover illustrates a free-standing, ferroelectric, hafnia-zirconia nano-resonator, realized from 50nm I Hf i SB 0.5 sb I Zr i SB 0.5 sb I O i SB 2 sb - I Al i SB 2 sb I O i SB 3 sb nanolaminates. Optical excitation and detection of in-plane and out-of-plane resonance modes enables accurate determination of Young's modulus and residual stress. Resolving Mechanical Properties and Morphology Evolution of Free-Standing Ferroelectric Hf0.5Zr0.5O2. [Extracted from the article]
Databáze: Complementary Index