Effect of substrate temperature on plasma-enhanced self-assembling formation of high-density FePt nanodots.

Autor: Honda, Shunsuke, Makihara, Katsunori, Taoka, Noriyuki, Furuhata, Hiroshi, Ohta, Akio, Oshima, Daiki, Kato, Takeshi, Miyazaki, Seiichi
Zdroj: Japanese Journal of Applied Physics; Jan2022, Vol. 61 Issue SA, p1-5, 5p
Abstrakt: We formed FePt magnetic nanodots (NDs) by exposing an ultrathin bilayer metal stack on ∼3.0 nm SiO2/Si(100) substrates to a remote H2 plasma (H2-RP) and studied the effect of external heating during the exposure to H2-RP on the formation and magnetic properties of NDs. The ultrathin bilayer with a uniform surface coverage drastically changed to NDs with an areal density as high as ∼3.5 × 1011 cmâˆ'2 by exposing to H2-RP with external heating. We also found that NDs formed by the exposure to H2-RP at 400 °C exhibited a perpendicular anisotropy with a perpendicular coercivity of ∼1.5 kOe, reflecting the magneto-crystalline anisotropy of (001)-oriented L10 phase FePt. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index
Externí odkaz: