| Autor: |
Bessouet, Clément, Lemettre, Sylvain, Kutyla, Charlotte, Bosseboeuf, Alain, Coste, Philippe, Sauvage, Thierry, Lecoq, Hélène, Wendling, Olivier, Bellamy, Aurélien, Jagtap, Piyush, Escoubas, Stéphanie, Guichet, Christophe, Thomas, Olivier, Moulin, Johan |
| Předmět: |
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| Zdroj: |
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2021, Vol. 39 Issue 6, p1-2, 2p |
| Abstrakt: |
The next-to-last sentence in the first paragraph on pg. 054202-4 should read, "The shift in the peak positions of 222 Y SB 2 sb O SB 3 sb and 002 Y after annealing is also evident from XRD measurements." Erratum: "Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation" [J. Vac. XRD analysis of evaporated yttrium films after different exposures to oxygen. [Extracted from the article] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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