Development of a 0.15 μm GaAs pHEMT Process Design Kit for Low-Noise Applications.

Autor: Dobush, Igor M., Vasil'evskii, Ivan S., Zykov, Dmitry D., Bragin, Dmitry S., Salnikov, Andrei S., Popov, Artem A., Gorelov, Andrey A., Kargin, Nikolay I.
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Zdroj: Electronics (2079-9292); Nov2021, Vol. 10 Issue 22, p2775, 1p
Abstrakt: This work presents a process design kit (PDK) for a 0.15 μm GaAs pHEMT process for low-noise MMIC applications developed for AWR Microwave Office (MWO). A complete set of basic elements is proposed, such as TaN thin film resistors and mesa-resistors, capacitors, inductors, and transistors. The developed PDK can be used in technology transfer or education. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index