Optimizing curvilinear ILT recipe development with machine learning based pattern selection.
| Autor: | Ma, Yuansheng, Wu, Rui, Lei, Junjiang, Mizuuchi, Keisuke, Tritchkov, Alexander, Jiang, Fan, Hong, Dingyi, Ali, Rehab, Hong, Le, Sun, Yuyang |
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| Zdroj: | Proceedings of SPIE; 7/6/2021, Vol. 11855, p118550T-118550T-10, 1p |
| Databáze: | Complementary Index |
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