3D-MC modelling of particle contamination induced defects in ebeam mask writing.
| Autor: | Klikovits, Jan, Polster, Robert, Hofmann, Ulrich, Feicke, Axel, Wandel, Timo |
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| Zdroj: | Proceedings of SPIE; 7/6/2021, Vol. 11855, p1185503-1185503, 1p |
| Databáze: | Complementary Index |
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