Improved stability of black silicon detectors using aluminum oxide surface passivation.
| Autor: | Heinonen, Juha, Haarahiltunen, Antti, Kettunen, Heikki, Jaatinen, Jukka, Rossi, Mikko, Heino, Jouni, Savin, Hele, Juntunen, Mikko A. |
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| Zdroj: | Proceedings of SPIE; 7/3/2021, Vol. 11852, p118520T-118520T-8, 1p |
| Databáze: | Complementary Index |
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