Mosaic Defects of AlN Buffer Layers in GaN/AlN/4H-SiC Epitaxial Structure.

Autor: ATAŞER, Tuğçe, DEMİR, Durmuş, BİLGİLİ, A. Kürşat, ÖZTÜRK, M. Kemal, ÖZÇELİK, Süleyman
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Zdroj: Journal of Polytechnic; Jun2021, Vol. 24 Issue 2, p511-516, 6p
Databáze: Complementary Index