Investigation of ICP dry etching of InAs/GaSb type-II superlattice LWIR photodetector.

Autor: Andresen, Bjørn F., Fulop, Gabor F., Zheng, Lucy, Kimata, Masafumi, Miller, John Lester, Jung, Hyun Chul, Kang, Ko Ku, Ryu, Seong Min, Lee, Tae Hee, Kim, Jong Gi, Eom, Jun Ho, Kim, Young Chul, Jang, Ahreum, Lee, Hyun Jin, Kim, Young Ho, Jung, Han, Kim, Sun Ho, Choi, Jong Hwa
Zdroj: Proceedings of SPIE; 3/14/2021, Vol. 11741, p117411V-117411V-5, 1p
Databáze: Complementary Index