Deep learning model and train method to increase the speed and accuracy in inline TFT-PAD area inspection.
| Autor: | Beyerer, Jürgen, Heizmann, Michael, Park, Da hyun, Yoon, Seong baek, Kim, Hyun woo, Kim, Hyeong jin, Kim, Yun hyeok, Lee, Hyo jin |
|---|---|
| Zdroj: | Proceedings of SPIE; 4/29/2021, Vol. 11787, p117870M-117870M-4, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|