Deep learning-based hotspot prediction of via printability in process window corners.
| Autor: | Yuan, Chi-Min, Kim, Ryoung-Han, Selvam, Punitha, Rezaeifakhr, Pouya, Schroeder, Uwe Paul, Bakshi, Janam, Mohamed, Omnia, Batarseh, Fadi, Madhavan, Sriram |
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| Zdroj: | Proceedings of SPIE; 11/7/2020, Vol. 11614, p116140X-116140X-8, 1p |
| Databáze: | Complementary Index |
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