An accurate and robust after-develop overlay measurement solution using YieldStar multi-wavelength optical metrology accompanied by a precise application strategy.
| Autor: | Adan, Ofer, Robinson, John C., Zhang, Pengzhen, You, Kai, Xuan, Pandeng, Feng, Yaobin, Shen, Longfei, Xu, Jolly, Hou, Ji-Ling, Shanmugasundaram, Saravana Prakash, Sui, Summer, Ren, Shiwei, Li, Chengkun, Fang, Jerry, Yu, Toby, Mozooni, Babak |
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| Zdroj: | Proceedings of SPIE; 11/4/2020, Vol. 11611, p116112U-116112U-7, 1p |
| Databáze: | Complementary Index |
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