Edge placement error wafer mapping and investigation for improvement in advanced DRAM node.
| Autor: | Adan, Ofer, Robinson, John C., Chen, Kuan-Ming, Henke, Wolfgang, Jung, Ji-Hoon, Kasperkiewicz, Ewa, Bouma, Anita, Rahman, Rizvi, Isai, Gratiela, Kim, Gwang-Gon, Tsiachris, Sotirios, Yoo, Jae-Doug, Park, Yuna, Park, JaeYoung, Won, Jonggeun, Oh, Nang-Lyeom, Chen, Hsin-Yu, Lin, WeiTai, Hsieh, Chih-Hung, Pao, Kuo-Feng |
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| Zdroj: | Proceedings of SPIE; 11/4/2020, Vol. 11611, p116111V-116111V-11, 1p |
| Databáze: | Complementary Index |
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