OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation.
| Autor: | Adan, Ofer, Robinson, John C., Schmidt, D., Durfee, C., Pancharatnam, S., Medikonda, M., Greene, A., Frougier, J., Cepler, A., Belkin, G., Shafir, D., Koret, R., Shtainman, R., Turovets, I., Wolfling, S. |
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| Zdroj: | Proceedings of SPIE; 11/4/2020, Vol. 11611, p116111U-116111U-11, 1p |
| Databáze: | Complementary Index |
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