Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions.
| Autor: | Adan, Ofer, Robinson, John C., Abaidi, Mohamed, Belissard, Jordan, Schuch, Nivea, Figueiro, Thiago, Millequant, Matthieu, Pradelles, Jonathan, Perraud, Loïc, Fay, Aurélien, Bustos, Jessy, Henry, Jean-Baptiste, Guyez, Estelle, Berard-Bergery, Sébastien, Schiavone, Patrick |
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| Zdroj: | Proceedings of SPIE; 11/4/2020, Vol. 11611, p1161118-1161118, 1p |
| Databáze: | Complementary Index |
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