Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to ⊘100 mm.
| Autor: | Panning, Eric M., Stauffenberg, Jaqueline, Reuter, Christoph, Ortlepp, Ingo, Holz, Mathias, Dontsov, Denis, Schäffel, Christoph, Zöllner, Jens-Peter, Rangelow, Ivo, Strehle, Steffen, Manske, Eberhard |
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| Zdroj: | Proceedings of SPIE; 11/3/2020, Vol. 11610, p1161016-1161016, 1p |
| Databáze: | Complementary Index |
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