Chemistry working for lithography: the Marangoni-effect-based single layer for enhanced planarization.
| Autor: | Sanders, Daniel P., Guerrero, Douglas, Dall'Asta, Valentina, Litterio, Emma, Corneo, Nicoletta, Koza, Jakub, Jeauneau, Jonathan, Bertarelli, Chiara, Barozzi, Eusebio, Bellunato, Tito F. |
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| Zdroj: | Proceedings of SPIE; 11/5/2020, Vol. 11612, p116120E-116120E-19, 1p |
| Databáze: | Complementary Index |
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