| Autor: |
Tikhonravov, A. V., Kochikov, I. V., Lagutina, A. A., Lagutin, I. S., Lukyanenko, D. V., Sharapova, S. A., Yagola, A. G. |
| Zdroj: |
Moscow University Physics Bulletin; Dec2020, Vol. 75 Issue 6, p578-584, 7p |
| Abstrakt: |
The paper presents a theoretical study of the correlation of errors in the thickness of layers of multilayer optical coatings produced using monochromatic monitoring of the deposition process. Estimates of the degree of error correlation in layer thicknesses are obtained for various algorithms for determining termination instants for layer depositions. It is shown that the parameter introduced to assess the degree of correlation gives an adequate idea of the error correlation in the case of monochromatic monitoring. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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