MBE Grown AlN Films on SiC for Piezoelectric MEMS Sensors.
| Autor: | Doppalapudi, Dharanipal, Mlcak, Richard, Chan, Jeffrey, Tuller, Harry, Bhattacharya, Anirban, Moustakas, Theodore |
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| Zdroj: | MRS Online Proceedings Library; 2003, Vol. 798 Issue 1, p193-198, 6p |
| Databáze: | Complementary Index |
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