Electrical and Structural Characterization of Boron Implanted Silicon Following Laser Thermal Processing.
| Autor: | Gable, K. A., Jones, K. S., Law, M. E., Robertson, L. S., Talwar, S. |
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| Zdroj: | MRS Online Proceedings Library; 2002, Vol. 717 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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